1 The laser scanning head and current scanner can freely change the direction of the optical axis of the same processing position
2 Achieve large optical axis tilt and high-speed scanning through our unique optical technology
3 Equipped with automatic calibration system using PSD sensor
4 Application areas: probe card processing, ceramic processing, precision mold processing, auto parts processing
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※1 Optical angle
Please contact our sales staff for details.
(*1) Scan circularity value depends on the correction result. Scanning condition: 200 Hz, φ 1.0 mm
Measurement condition: Measurement with the PSD sensor
Scanning pattern
2D pattern
In addition, a scanning pattern with a high degree of freedom can be realized by combining line segments.
Processing examples
In the high-precision laser drilling scanning system, the taper of the processed hole can be continuously controlled by a short pulse laser through high-speed scanning. It can drill holes in various workpieces such as Sus, SI and other metals and glass.
| Material | Si3N4 |
| Substrate Thickness | 350um |
| Process shape | Square 50um × 50um Hole wall width: 25um |
| Laser | Green Corner R < 3um (typical) |
| Material | SUS304 |
| Substrate Thickness | 750um |
| Process shape | Circle ø130um |
| Laser | Green |
